Analysis of Ultra Pure Water
 The deionized water used in any stage of semiconductor component manufacture is a potential source of contamination. As both inorganic and organic contaminants can have a deleterious effect on the final products, water quality must be monitored continually using reliable and high performance analytical equipment.
Agilent’s solutions for the analysis of ultra pure water
Semi-volatile organics, such as such as siloxanes and plasticizers, can be determined in ultra pure water (UPW) using a combination of thermal desorption and gas chromatography equipped with a mass selective detector. No organic solvents are required for this method, eliminating the risk of interference from contaminants in the solvents and thereby increasing sensitivity. Agilent offers thermal desorption systems through their partners CDS, USA, and Gerstel, Germany, and a range of high performance GC-MSD systems.
Agilent ICP-MS systems are used extensively for trace element determinations of ultra pure water. With a high-efficiency sample introduction system, 5th plasma gas line (for option gas addition), unmatched cool plasma capability, and second (reaction) cell gas line as standard on the 3rd generation Octopole Reaction System (ORS3) – the new 7700s ICP-MS offers the highest performance for the removal of intense interferences in UPW.
Literature
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