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Process Chemical Analysis 

Process Chemical Analysis
Basic Performance of the Agilent 7700s ICP-MS for the Analysis of Semiconductor Samples 
Accurate low-level analysis of trace components is required for the wide range of high purity chemicals used in the semiconductor industry. The Agilent ICP-MS with Octopole Reaction System (ORS) combines unmatched sensitivity, matrix tolerance, interference removal and stability in a single, reliable and easy-to-use system for determination of trace components such as Na, K, Ca, Fe, and Se. This system has been designed for cleanroom usage with a smaller size, easier maintenance and lower cleanroom service requirements than previous instruments. The most important organic solvent in the semiconductor industry is isopropyl alcohol (IPA), which is used to clean silicon wafers and must be analyzed periodically to check for contamination by trace metal elements. The figure shows excellent stability for a 100 ppt spike of several elements in undiluted IPA, measured continuously over 4 hours. Total signal variation was <5% RSD. View application note
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