Vacuum Technologies 

Turbo Pumps 

TwisTorr 304 FS 
Product Description
The Agilent TwisTorr 304 FS turbomolecular high-vacuum pump combines Twistorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps.  This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extent operating life, minimize system downtime, and assure stable pumping performance over time.  The unique bearing and dry lubrication in the TwisTorr 304 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with on-board or rack controllers.
  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
  • Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduce water consumption and cost-of-ownership.
  • Typical Turbo Pump Applications
  • Technical Specifications
     

    Pumping speed

    ISO 100 / CF 6”

    ISO 160 / CF 8”

    N2

    250 l/s

    250 l/s

    He

    255 l/s

    255 l/s

    H2

    220 l/s

    220 l/s

    Ar

    250 l/s

    250 l/s

    Gas throughput at full rotational speed (with recommended forepump)

    Ambient Temp.
    (25°C)

    Water Temp.
    (25°C, 50 l/h)

    N2

    170 sccm

    170 sccm

    Ar

    110 sccm

    110 sccm

    Compression ratio & Foreline Tolerance

    N2

    > 1 x 1011

    >10 mbar

    He

    > 1 x 108

    >10 mbar

    H2

    1.5 x 106

    >4 mbar

    Ar

    > 1 x 1011

    >10 mbar

    Base pressure with recommended forepump (5 m3/h)

    < 1 x 10-10 mbar  (< 1 x 10-10 Torr)

    Inlet flange

    CFF 8” O.D. ISO 160

    CFF 6” O.D. ISO 100

    Foreline flange

    KF16 NW (KF25 - optional)

    Rotational speed

    60000 rpm (1010 Hz driving frequency)

    Start-up time

    < 3 minutes

    Recommended forepump

    mechanical:

    Agilent DS 102

    dry pump:

    Agilent SH 110

    Operating position

    Any

    Operating ambient temperature

    +5 °C to +35 °C

    Relative humidity of air

    0 - 90 % (not condensing)

    Bakeout temperature

    80 °C at inlet flange max (ISO flange)

    120 °C at inlet flange max (CFF flange)

    Lubricant

    Permanent lubrication

    Cooling requirements

    Forced air (5- 35 °C ambient temperature)

    Water (mandatory if ambient temperature > 35 °C)

    Coolant water

    Minimum flow: 50 l/h (0.89 GPM)

    Temperature: +15 °C to +30 °C

    Pressure: 3 to 5 bar (45 to 75 psi)

    Noise Pressure level

    < 50 dB(A) at 1 meter

    Storage temperature

    -40° C to +70° C

    Max altitude

    3000 m

    Weight kg (lbs)

    Pump ISO 100

    5.5 kg (12.3)

    Pump CFF 6’’

    7.5 kg (16.5)

    Pump ISO 160

    5.7 kg (12.6)

    Pump CFF 8’’

    9.7 kg (20.9)

    Outline Drawing ISO 100

    TwistTorr 304 FS ISO 100 Turbo Pump Outline Drawing

    Outline Drawing CF 6”

    TwistTorr 304 FS CF 6” Turbo Pump Outline Drawing

                Applications:

                Academic, Government & Research: Analytical Instruments: Industrial Processes: Nanotechnologies & Semiconductor Instrumentation:
                Nuclear research Mass Spectrometry Thin Film Deposition SIMS, SEM, TEM
                Cryogenics GCMS Q-TOF Hard Disk coating Surface Analysis
                Fusion technology LCMS Q-TOF Solar Cells MBE
                Plasma physics Ion trap LCMS Optical Coating Load lock transfer chambers
                Particle accelerators Residual Gas Analysis Surface treatment PVD/CVD tools
                Synchrotrons Maldi TOF E-beam welding LED MOCVD
                UHV systems ICP-MS Electron devices Bonding

              • Visit the Online Store, contact your local Agilent sales office or distributor (in the U.S. and Canada, call 1- 800-882-7426) or Request a Quote to get more detailed ordering information including prices and availability.

                Description Part Number
                Pumps TwisTorr 304 FS Turbo Pump, ISO100, water cooled X3500-64000
                TwisTorr 304 FS Turbo Pump, CFF6, water cooled X3500-64001
                TwisTorr 304 FS Turbo Pump, ISO160, water cooled X3500-64002
                TwisTorr 304 FS Turbo Pump, CFF8, water cooled X3500-64003
                TwisTorr 304 FS Turbo Pump, ISO100 X3500-64004
                TwisTorr 304 FS Turbo Pump, CFF6 X3500-64005
                TwisTorr 304 FS Turbo Pump, ISO160 X3500-64006
                TwisTorr 304 FS Turbo Pump, CFF8 X3500-64007
                TwisTorr 304 FS SF Split Flow Turbo Pump, ISO100, water cooled X3500-64010
                Controllers TwisTorr 304 FS Onboard controller, 24Vdc X3507-64002
                TwisTorr 304 FS Onboard controller, 100-240Vac X3507-64003
                TwisTorr 304 FS AG rack controller with RS232/485 X3506-64002
                TwisTorr 304 FS AG rack controller with Profibus X3506-64003
                Accessories Mains cable NEMA Plug, 3m long 969-9958
                Mains cable European Plug, 3m long 969-9957
                Serial cable and T-Plus Software 969-9883
                Inlet screen, ISO 100 X3500-68000
                Inlet screen CFF 6’’ 969-9302
                Inlet screen, ISO 160 X3500-68001
                Inlet screen CFF 8’’ 969-9304
                Water cooling kit 969-9337
                Plastic water cooling kit 969-9347
                Air cooling kit for On-board Controller X3500-68010
                Fan extension cable, On-board controller 969-9949
                Fan extension cable, rack AG controller 969-9940
                Air cooling kit for Rack AG Controller X3500-68011
                Bracket for On-Board Controller side mounting X3500-68012
                Foreline flange KF25 1/4 gas 969-9130
                Purge valve 10 SCCM ¼ Swagelok – ¼ Swagelok 969-9232
                Purge valve 10 SCCM ¼ Swagelok – M12 969-9240
                Purge valve 10 SCCM NW16KF – M12 969-9239
                Purge valve 20 SCCM ¼ Swagelok – ¼ Swagelok 969-9236
                Purge valve 20 SCCM ¼ Swagelok – M12 969-9242
                Purge valve 20 SCCM NW16KF – M12 969-9241
                Vent device with adjustable delay time (110-220V) X3505-68000
                Vent flange, NW 10 KF / M8 969-9108
                Vent valve for AG Rack Controller 969-9844
                Vent valve for on-board Controller 969-9834
                Vibration damper, ISO 100 IDX 969-9396
                Vibration damper, CF 6" 969-9334
                Vibration damper, CF 8" 969-9335
                Vibration damper, ISO 100 969-9344
                Vibration damper, ISO 160 969-9345
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