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SF6 Purity Analysis by Micro GC
Abstract:
A method for SF6 purity analysis is discussed in this application note. PLOT Q and Gaspro columns were found to be suitable for the analysis of contaminants in SF6. Sulfor compounds are detected in the Gaspro channel and the total analysis time is less than 2 minutes.
Keywords:
SF6 purity analysis, micro GC, Inorganic Chemicals
Publication Number:
5989-7430EN
Last Updated:
10/30/2009
Number of Pages:
2
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(0.09 MB)