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Typical Turbo Pumping System Applications 

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Agilent turbo pumping systems (TPS) are designed for demanding vacuum applications in a variety of areas. Both the Mini-Task AG81 and TPS-compact are portable, fully integrated vacuum solutions are available in light dry bench-top solutions for small and medium volumes; or in high capacity, wide pumping speed range cart versions. Choose from a wide range of gauges, valves and components to meet your specific application. If you do not find a turbo pumping system to meet your requirements, ask about design of a custom system just for you. The TPS systems are supported by the excellent Agilent applications and technical support organizations.

Typical Mini-Task AG81 and TPS-compact Applications

Segment Details Applications
Mass Spectrometry and Analytical Instrumentation
  • Medical accelerators for cancer therapy
  • Medical accelerators
Research and Development
  • Create high vacuum in small-volume chambers quickly and easily
  • New-generation electronics and pressure display ensure process accuracy
  • Mini-Task is best used for evacuating volumes of 10 liters or less
  • High-Energy Physics  Research Centers
  • General Vacuum
Industrial Vacuum Processing
  • Create or maintain vacuum in separate chamber of an industrial system during maintenance or repair
  • Keeps the chamber clean
  • Industrial Vacuum
Nanotechnology
  • Keep the column of an electron microscope under vacuum while performing maintenance or repair on the device
  • Oil free, no column contamination by oil ensures semiconductor process purity
  • Well suited for evacuating load-lock chambers
  • Mount in any position
  • Electron Microscopy
  • Semiconductor Manufacturing

 
 
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